منابع مشابه
Ashing Technique For Nano-gap Fabrication of Electrostatic Transducers
Using a low temperature process flow, a photoresist ashing technique was developed to define nano-gaps for the fabrication of electrostatically transduced RF MEMS. This was performed by shrinking laterally the photoresist to the required dimension in a O2 plasma etch system. Polycrystalline silicon-germanium (poly-SiGe) films replaced poly silicon as the structural layer, while poly germanium w...
متن کاملUltrasonic measurement of gas flow using electrostatic transducers.
Ultrasonic gas flowmeters typically use narrowband piezoelectric transducer arrangements for interrogating the flow of gas in a pipe. In this work, the suitability of broadband electrostatic transducers operating at frequencies of up to 1 MHz for ultrasonic measurement of gas flow has been investigated. The transit time method of ultrasonic gas flow measurement was adopted and experiments were ...
متن کاملPerformance limitations of piezoelectric and force feedback electrostatic transducers in different applications
Current limitations in piezoelectric and electrostatic transducers are discussed. A force-feedback electrostatic transducer capable of operating at bandwidths up to 20 kHz is described. Advantages of the proposed design are a linearised operation which simplifies the feedback control aspects and robustness of the performance characteristics to environmental perturbations. Applications in nanote...
متن کاملRigorous 3D Electrostatic Field Analysis of SAW Transducers with Closed-Form Formulae
The extreme requirements of SAW filter design for stringent specifications demand the knowledge of the exact nonuniform charge distribution along the fingers, especially for narrow-aperture, curved-finger and for apodized transducers. To solve this problem we present a natural extension of our previously published work, developing a self-contained, comprehensive method for three dimensional (3D...
متن کامل3-d Micromachined Spherical Shell Resonators with Integrated Electromagnetic and Electrostatic Transducers
(a) Before glassblowing (b) After glassblowing Figure 2: Photographs of fabricated 3-D spherical shell resonators with integrated electrostatic transducers. This paper presents a new paradigm for design and fabrication of 3-D spherical shell resonators. The approach uses pressure and surface tension driven plastic deformation (glassblowing) on a wafer scale as a mechanism for creation of inhere...
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ژورنال
عنوان ژورنال: The Journal of the Acoustical Society of America
سال: 1959
ISSN: 0001-4966
DOI: 10.1121/1.1936136